Study of the optical properties of SiOxNy thin films by effective medium theories
Bibliographic record
Abstract
Silicon oxynitride (SiOxNy) films were deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD) and covered the entire composition range from silicon dioxide to silicon nitride. The composition of the films was determined by Rutherford backscattering spectroscopy (RBS), nuclear reaction analysis (NRA), and elastic recoil detection (ERD). These techniques provide the absolute areal concentrations of all elements, including silicon, oxygen, nitrogen, and hydrogen. Additionally, Fourier transform infrared (FTIR) spectroscopy and ellipsometry measurements were performed for the optical characterization of the thin films. Effective medium theories (EMT) were used to model the optical and compositional properties of the SiOxNy films. The refractive index measured by ellipsometry was compared with theoretical calculations using Maxwell–Garnett and Bruggeman equations. The experimental results agree quite well with model data. It is also shown that the concentration of hydrogen in the films has a major influence on the quality of the agreement.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".