InP in HBTs by vertical and lateral wet etching
Bibliographic record
Abstract
We present a study of the vertical and lateral etching of InP with the mask sides parallel to the [0,0,1] and [0,1,0] crystal orientations using HCl:H/sub 3/PO/sub 4/-based solutions. This etch is used to fabricate self-aligned emitter-up and collector-up HBT structures with reduced parasitic resistances and capacitances. The techniques presented are also applicable to double-heterojunction HBTs. The etch rate, homogeneity and surface quality are presented as a function of HCl concentration and solution temperature. The present etching technique was used to fabricate fully self-aligned emitter-up and collector-up InP/InGaAs HBTs. The minimum distance between the base contact and the emitter active area for self-aligned emitter-up HBTs is <0.3 /spl mu/m. In collector-up HBTs, emitter widths as small as 0.5 /spl mu/m were formed by lateral etching with a relative area fluctuation less than 10%.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".