Inductively coupled plasma etching of InP using CH4/H2 and CH4/H2/N2
Bibliographic record
Abstract
Inductively coupled plasma etching of InP in CH4/H2 and CH4/H2/N2 gas mixtures was studied to understand the etching mechanisms and the influence of etching gas composition on etching rate, etching profile, and surface morphology. CH4/H2 plasmas generally had higher etching rates than CH4/H2/N2 plasmas. Deterioration of InP surfaces, following etching, reflected the preferential loss of P over In due to the diffusivity and reactivity of H being higher than CH3 on InP surfaces, and also since PH3 is more volatile than In(CH3)3. In extreme circumstances, this can lead to the formation of In-rich droplets on the surface, with associated surface roughening. This was supported by the opposing trends of surface roughness (measured using atomic force microscopy) and P/In ratio (from x-ray photoelectron spectroscopy) as a function of the CH4 gas concentration for CH4/H2 gas mixtures. The addition of N2 to the CH4/H2 plasmas improved the surface morphology as N radicals reduced the rate of P removal by reacting with H radicals. However, an inevitable increase in the N+ and N2+ concentrations led to erosion of the SiO2 masks and caused sloping sidewalls.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".