Measurement of energy flux at the substrate in a magnetron sputter system using an integrated sensor
Why this work is in the frame
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Bibliographic record
Abstract
Knowledge of the energy flux in a sputter deposition system is important for predicting and controlling the properties of the growing film. The use of discrete sensors such as thermocouples for heat measurement has a potential contact problem due to the temperature jump between the surface of the wall and the surrounding gas especially at very low pressures. Embedded sensors such as a microfabricated polysilicon thin film thermistor eliminates the problem associated with thermal connection. In this study, the fabricated sensor is calibrated using ohmic self-heating before the deposition plasma is switched on, and also after the plasma is switched off (passive mode). At low pressures (up to 20 mTorr), pressure has an insignificant effect on the thermal resistance of the sensor. For substrate temperatures up to 250 °C, the sensor response is linear with input power. For a 3 in magnetron system, values of steady state energy flux measured with the sensor range from 5 to 46 mW/cm2 for aluminum (Al) and 14 to 114 mW/cm2 for copper (Cu) depending on the process conditions. These values compare well with those determined theoretically. Magnetron power was varied between 75 and 300 W, gas pressure 5–10 mTorr, and substrate–target distance 10.8–21 cm.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it