Populations of metastable and resonant argon atoms in radio frequency magnetron plasmas used for deposition of indium-zinc-oxide films
Bibliographic record
Abstract
This work reports optical absorption spectroscopy measurements of the number density of Ar atoms in resonant (3P1, 1P1) and metastable (3P2, 3P0) states in rf magnetron sputtering plasmas used for the deposition of ZnO-based thin films. While the density of Ar 3P2 and 3P0 was fairly independent of pressure in the range of experimental conditions investigated, the density of Ar 3P1 and 1P1 first sharply increased with pressure and then reached a plateau at values close to those of the 3P2 and 3P0 levels at pressures above about 50 mTorr. At such pressures, ultraviolet radiation from resonant states becomes trapped such that these levels behave as metastable states. For a self-bias voltage of −115 V and pressures in the 5–100 mTorr range, similar number densities of Ar resonant and metastable atoms were obtained for Zn, ZnO, and In2O3 targets, suggesting that, over the range of experimental conditions investigated, collisions between these excited species and sputtered Zn, In, and O atoms played only a minor role on the discharge kinetics. The metastable-to-ground state number density ratios were also fitted to the predictions of a global model using the average electron temperature, Te, as the only adjustable parameter. For all targets examined, the values of Te deduced from this method were in excellent agreement with those obtained from Langmuir probe measurements.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.002 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".