Synthesis and Characterization of Tris(β‐ketoiminato)ruthenium(<scp>III</scp>) Complexes: Potential Precursors for CVD of Ru and RuO<sub>2</sub> Thin Films
Bibliographic record
Abstract
Abstract The synthesis and characterization of Ru III metal complexes [Ru(keim1) 3 ] ( 1 ) and [Ru(keim2) 3 ] ( 2 ) are reported, where (keim)H is an abbreviation for the fluorinated ketoimine ligands with formula HOC(CF 3 )=CHCR=NMe; (keim1)H with R = Me and (keim2)H with R = CF 3 . These newly synthesized complexes were characterized by spectroscopic methods, while the second complex, 2 , was further examined by single‐crystal X‐ray diffraction (XRD), revealing an octahedral coordination for the Ru cation, with three ketoiminate arranged in a mer ‐configuration, a consequence of the enhanced steric interaction between ligands. Moreover, both Ru metal complexes show good volatility and thermal stability. CVD experiments were conducted using these complexes at temperatures of 325–450 °C. The Ru metal and RuO 2 thin films on silicon wafers were successfully obtained using either a mixture of 2 % O 2 in argon or pure O 2 as the carrier gas, respectively. Our result shows that a 2 % O 2 concentration induces the formation of Ru metal, while that only complex 1 gives formation of a columnar RuO 2 phase upon switching to pure O 2 as the CVD carrier gas. Scanning electron microscopy (SEM) images were taken to reveal surface morphologies, while X‐ray photoelectron spectroscopy (XPS) and XRD were utilized to access their atomic composition as well as the intrinsic packing of the as‐deposited thin film materials.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".