Sub-spot-size CO 2 laser micromachining of features in fused silica by V-groove etching
Bibliographic record
Abstract
ABSTRACT Ablation of fused silica using the Gaussian irradiance profile of the TEM 00 mode of a CO 2 laser is a very efficient wayfor micromachining features up to ten times smaller than the beam diameter. A series of laser-etched V-groovessequentially shifted in a given fashion can be used to micromachine simple or structured patterns on the surface of fusedsilica substrates. Surface gratings with a periodicity of 12 µm were produced using a CO 2 laser beam of 100 µm (1/e 2 )in diameter. Rectangular wells 50 µm wide and 50 µm deep were also micromachined using the same technique with aradius of curvature of roughly 8 µm at the bottom edges. Although the resolution of the periodic pattern is not fullyunderstood, it appears to be partly governed by the amount of material removal by the top portion of the Gaussian beam(tip processing), as well as a carefully controlled shifting of the etched V-grooves on the fused silica substrate. Physicalmechanisms that could be at the origin of the V shape of the grooves are also discussed.Keywords: Laser ablation, laser micromachining, laser proce ssing, laser etching, fused silica, surface gratings
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".