Sub-spot-size CO 2 laser micromachining of features in fused silica by V-groove etching
Bibliographic record
Abstract
ABSTRACT Ablation of fused silica using the Gaussian irradiance profile of the TEM 00 mode of a CO 2 laser is a very efficient wayfor micromachining features up to ten times smaller than the beam diameter. A series of laser-etched V-groovessequentially shifted in a given fashion can be used to micromachine simple or structured patterns on the surface of fusedsilica substrates. Surface gratings with a periodicity of 12 µm were produced using a CO 2 laser beam of 100 µm (1/e 2 )in diameter. Rectangular wells 50 µm wide and 50 µm deep were also micromachined using the same technique with aradius of curvature of roughly 8 µm at the bottom edges. Although the resolution of the periodic pattern is not fullyunderstood, it appears to be partly governed by the amount of material removal by the top portion of the Gaussian beam(tip processing), as well as a carefully controlled shifting of the etched V-grooves on the fused silica substrate. Physicalmechanisms that could be at the origin of the V shape of the grooves are also discussed.Keywords: Laser ablation, laser micromachining, laser proce ssing, laser etching, fused silica, surface gratings
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".