Fabrication of nanoelectromechanical systems via the integration of high surface area glancing angle deposition thin films
Bibliographic record
Abstract
Nanoelectromechanical systems (NEMS) coated with a high surface area thin film are fabricated. Glancing angle deposition (GLAD) is used to uniformly deposit high surface area, nanostructured SiO 2 films on top of released NEMS. The resonance frequencies and quality factors are measured to assess the potential of the high surface area NEMS for sensing experiments. Resonance frequencies of coated cantilevers, although reduced by mass loading, can be predicted accurately using our derived model. Compressive stress makes the resonance frequencies of coated doubly-clamped beams difficult to predict. The quality factors of the coated NEMS are reduced by one order of magnitude by a quasi-continuous layer at the base of the GLAD film, which also introduces an estimated compressive stress of 5.3–9.3 MPa. The limit of detection is demonstrated to be ∼2 pg cm −2 . With this successful proof-of-concept demonstration, we anticipate the future use of these devices as high surface area gravimetric mass sensors for applications such as gas chromatography.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".