Fabrication of nanoelectromechanical systems via the integration of high surface area glancing angle deposition thin films
Bibliographic record
Abstract
Nanoelectromechanical systems (NEMS) coated with a high surface area thin film are fabricated. Glancing angle deposition (GLAD) is used to uniformly deposit high surface area, nanostructured SiO2 films on top of released NEMS. The resonance frequencies and quality factors are measured to assess the potential of the high surface area NEMS for sensing experiments. Resonance frequencies of coated cantilevers, although reduced by mass loading, can be predicted accurately using our derived model. Compressive stress makes the resonance frequencies of coated doubly-clamped beams difficult to predict. The quality factors of the coated NEMS are reduced by one order of magnitude by a quasi-continuous layer at the base of the GLAD film, which also introduces an estimated compressive stress of 5.3-9.3 MPa. The limit of detection is demonstrated to be ∼2 pg cm-2. With this successful proof-of-concept demonstration, we anticipate the future use of these devices as high surface area gravimetric mass sensors for applications such as gas chromatography.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".