Operational regimes of the saddle field plasma enhanced chemical vapor deposition system
Bibliographic record
Abstract
The electrical potential at the substrate surface during the growth of hydrogenated microcrystalline silicon in a direct current saddle field (SF) plasma enhanced chemical vapor deposition (PECVD) system has been previously shown to be a limiting factor for the formation of the microcrystalline phase in the resulting thin films. The authors examine the extension of this concept to large areas under conditions necessary to obtain microcrystalline silicon in a SF-PECVD system—namely the use of hydrogen-diluted silane as a source gas, pressures between 100 and 300 mTorr, and substrate electrical bias between 100 and 250 V. The response of the SF-PECVD system to electrical substrate bias under these conditions is examined in detail, and four regimes of operation are identified, only one of which is useful for the growth of this particular material system. The delineation of these regimes provides new constraints and guidelines for the application of SF-PECVD technology to large-area deposition of thin films sensitive to ion bombardment during growth, such as microcrystalline silicon.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".