Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
Bibliographic record
Abstract
Low-temperature (<250 °C) plasma-enhanced atomic layer deposition (PEALD) is used to fabricate aluminum nitride (AlN)/gallium nitride (GaN) heterojunctions for tunnelling contacts in devices where selective contacts are required, such as GaN metal–oxide semiconductor field-effect transistors. AlN is grown on GaN templates with via low-temperature plasma-enhanced ALD, and compared in order to extract their surface two-dimensional electron gas concentration. A peak electron density of >2 × 1013 cm−2 was observed for an approximately 4.5 nm AlN thickness on GaN wafers with a higher initial doping concentration while for the lightly doped GaN samples, a peak carrier concentration of 1.9 × 1013 cm−2 was observed for a thickness of 5.7 nm AlN. Polarization is strongest near the AlN critical thickness of strain relaxation for low-temperature deposition methods. This suggests that greater initial dopant concentrations are more conducive to enhanced polarization characteristics under these low growth temperatures because the critical thickness is realized at lower thicknesses. This approach also yields a low contact resistance of 0.45 Ω mm with Al contacts.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".