Accuracy of photocarrier radiometric measurement of electronic transport properties of ion-implanted silicon wafers
Bibliographic record
Abstract
The determination of the electronic transport properties of ion-implanted silicon wafers with the photocarrier radiometry (PCR) technique by fitting frequency scan data to a single layer model via a multiparameter fitting procedure is presented. A three-layer model is used to simulate the inhomogeneous structure of the ion-implanted wafers. The effects of the structural, electronic, and optical properties of the implanted layer, which are affected significantly by ion implantation, on the frequency behavior of the PCR signal of implanted wafers are discussed. Data simulated with the three-layer model are fitted to a single-layer model to extract the electronic transport properties of implanted wafers. The fitted carrier lifetime and diffusion coefficient are found to be close to that of the substrate layer which is assumed to remain intact after the ion implantation process. When self-normalized relative amplitude is used in the multiparameter fitting, the fitted surface recombination velocity is determined primarily by the level of electronic damage and is approximately independent of the level of optical damage. Experiments with boron implanted wafers were performed and the experimental results were in agreement with the simulations. These results show that the PCR technique is capable of measuring the bulk transport properties of ion-implanted silicon wafers.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".