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Record W2015172374 · doi:10.1117/12.543395

Precise surface profilometry based on low-coherence interferometry

2003· article· en· W2015172374 on OpenAlexaff
M. Dufour, Bruno Gauthier

Bibliographic record

VenueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003
Typearticle
Languageen
FieldComputer Science
TopicOptical measurement and interference techniques
Canadian institutionsNational Research Council Canada
Fundersnot available
KeywordsProfilometerInterferometryCoherence (philosophical gambling strategy)OpticsComputer scienceMaterials sciencePhysicsSurface roughness

Abstract

fetched live from OpenAlex

Low coherence interferometry (LCI) can be used to measure the profile of industrial products, the measured sample being scanned under the LCI probe. Axial distance measurements are made using the light reflected by the surface and collected on the same optical axis used for its illumination. Therefore, when the transverse resolution is not an issue, only a narrow laser beam is required and hard-to-reach surfaces can be probed with axial accuracy in the range of 1μm. With other techniques such as triangulation the surface requires to be visible from another point-of-view and complex shapes often become inaccessible. When the LCI instrument is assembled with optical fibers, delicate instrumentation may be kept away from harsh environments and only a single optical fiber needs to get close to the measurement location. However, optical fibers are particularly sensitive to temperature and a reference is required to compensate for path length drifts. Furthermore, industrial mechanical displacement systems typically induce positioning errors much larger than the LCI instrument accuracy. One approach to circumvent these problems consists in measuring the location of another surface close to the region of interest. Such a reference surface is not always available and typically requires a second probe. We found a more practical approach by using an optical quality window located over the sample surface and moving with the sample. The laser beam from the LCI instruments travels across the window just before it reaches the samples surface. The window surface induces a first reflection (4% of the incident power) and its distance is measured by the LCI as well as the sample surface distance. Since the location of the window is fixed relative to the sample while the entire surface is scanned, out-of-plane movement of the motorized slide is compensated. High-resolution measurements are obtained by simply subtracting the window plane from the sample surface.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.001
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.547
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.001
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.001
Bibliometrics0.0000.001
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0020.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.019
GPT teacher head0.241
Teacher spread0.222 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations2
Published2003
Admission routes1
Has abstractyes

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Same venueProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIESame topicOptical measurement and interference techniquesFrench-language works237,207