Bibliographic record
Abstract
A three-degrees-of-freedom microelectromechanical systems (MEMS) electrostatic actuator was developed, fabricated, and tested. The actuator utilizes a piston-tube configuration that enables the use of electrodes with a wide area. Therefore, a large output force can be generated. The actuator also utilizes a flexure mechanism in which the in-plane (x-y) stiffness is high compared with the out-of-plane (z-axis) stiffness. This flexure mechanism enables a large translation stroke along the z-axis before experiencing lateral pull-in instability. A prototype of the actuator was able to achieve a pure translation (piston-style motion) of 28 μm at 80 V and an angle of rotation of 0.78° at 70 V. A mass of 1 mg was translated 24 μm at 80 V, indicating the ability of the actuator to provide high output force. The actuator was fabricated using the Micralyne MicraGEM-Si MEMS fabrication process, in which the pistons and tubes are fabricated in the device layers of two bonded Silicon on insulator (SOI) wafers. The misalignment between the pistons and the tubes using this process was ~0.005 of the gap between adjacent pistons and tubes. This amount of misalignment leads to a negligible lateral instability effect.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".