Spectroscopic Investigation of the Synthesis of Thin Silicon Nitride Films on Silicon Single-Crystal Wafers via Ammonia-Assisted Pyrolysis of Organosilicon Polymers
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
Thin layers of a -Si 3 N 4 were synthesized by the pyrolysis of thin films of poly(methylsilane) (PMS) and poly(dimethylsilane) (PDMS) spin-coated on silicon single-crystal wafers and via deposition of the volatile species resulting from the thermal cracking of the bulk precursor in the presence of ammonia. The process was monitored by FT-IR spectroscopy. The reaction between NH 3 and PMS begins at 200 °C with the slow production of a slightly cross-linked product involving Si 3 N knots. Extensive amination of PMS occurs on pyrolysis at 300 °C, under 5−10 Torr NH 3 overpressure. The product exhibits IR bands characteristic of both a silazane and an aminosilane species, which are presumably formed by Si−H and N−H heterodehydrocoupling. Between 200 and 450 °C, this cross dehydrocoupling reaction competes very effectively with the Kumada rearrangement. Significant loss of carbon occurs from the resulting poly(carbosilazane) between 500 and 600 °C. Prolonged curing under NH 3 at 300 °C, to remove all Si−H groups and to give a densely cross-linked polysilazane, suppresses the Kumada rearrangement, and negligible carbon loss occurs on raising the pyrolysis temperature to 700 °C. Although the main product is still a -SI 3 N 4, there is an increased amount of residual carbon.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.004 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it