An Effective Interlayer Dielectric and Passivation Scheme Using Reactively Sputtered AL 2 O 3 for (Ba,Sr)TiO 3 Capacitors
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Bibliographic record
Abstract
Interlayer dielectric and passivation layers for BST capacitors are often very hydrogen rich as a result of the by-products generated during the fabrication process. This hydrogen is well known to significantly degrade the leakage characteristics of the underlying BST capacitors. [1] While it is possible to focus on modifying interlayer dielectric (ILD) or passivation processes to minimize hydrogen exposure, it is preferable to maintain standard process modules available in silicon fabrication lines for case of manufacturing. However, post-deposition annealing is frequently required to reduce the effects of hydrogen, which may migrate into the capacitor during these deposition processes. It is known that Al 2 O 3 films provide an effective barrier to hydrogen migration, even at high temperatures. This paper discusses the integration of a reactively sputtered Al 2 O 3 barrier layer into the interlayer dielectric and passivation process flows of BST thin film capacitors to reduce device degradation during backend processing. Reactively sputtered Al 2 O 3 films were integrated into the production ILD process flow for BST thin film capacitors. Results indicate significant reduction in the post-deposition annealing time is possible while maintaining stable I-V characteristics on the finished devices. The barrier layer can also be etched by standard RIE tools used to etch other common oxides in silicon processing. Aggressive backend passivation schemes were also evaluated to determine the process window available for robust backend integration.
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Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
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