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Record W2042004883 · doi:10.1063/1.2060927

A kinetic model for the oxidation of silicon germanium alloys

2005· article· en· W2042004883 on OpenAlexaff
Mohamed A. Rabie, Yaser M. Haddara, Jacques Carette

Bibliographic record

VenueJournal of Applied Physics · 2005
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsMcMaster University
Fundersnot available
KeywordsGermaniumSiliconOxidizing agentOxideMaterials scienceGermanium oxideAlloyDiffusionSilicon oxideInorganic chemistryAnalytical Chemistry (journal)MetallurgyChemistryThermodynamicsEnvironmental chemistryPhysicsOrganic chemistry

Abstract

fetched live from OpenAlex

We propose a complete model for the oxidation of silicon germanium. Our model includes the participation of both silicon and germanium atoms in the oxidation process and the replacement by silicon of germanium in mixed oxides. Our model is capable of predicting, as a function of time, the oxide thickness, the profile of the silicon in the underlying alloy, and the profile of germanium in the oxide. The parameters of the model vary with temperature, alloy composition, and oxidizing ambient. The model shows excellent agreement with published results, with model parameters following trends consistent with the physical phenomena hypothesized. The presence of germanium catalyzes both the silicon and the germanium oxidation rates, and all reaction rates increase with increasing temperature. The resulting effective oxidation rate is enhanced, with respect to the oxidation of pure silicon, at all germanium concentrations. Mixed oxides form only in the case of high germanium concentrations, but at high temperatures the rapid growth of a thick oxide results in a slowing of oxidant diffusion, and the oxide composition switches back to a pure silicon oxide.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: Simulation or modeling
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.008
Threshold uncertainty score0.025

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.001
Meta-epidemiology (narrow)0.0010.001
Meta-epidemiology (broad)0.0020.002
Bibliometrics0.0010.001
Science and technology studies0.0010.001
Scholarly communication0.0020.003
Open science0.0030.001
Research integrity0.0030.001
Insufficient payload (model declined to judge)0.0070.002

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.019
GPT teacher head0.229
Teacher spread0.211 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designSimulation or modeling
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations43
Published2005
Admission routes1
Has abstractyes

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