Amorphisation and sub‐100‐nm exfoliation of hydrogen‐ion‐implanted silicon
Bibliographic record
Abstract
Abstract The basic physics and the chemical role of H in amorphisation and exfoliation of H‐ion‐implanted silicon were investigated by Raman scattering and transmission electron microscopy. We found that a continuous, thermally stable, 50‐nm‐thick amorphous layer formed upon implantation of 5‐keV H ions at 150 K. Such amorphisation is contrary to earlier theoretical predictions but gives support to recent molecular dynamics calculations. After high temperature annealing, H‐saturated mono‐ and di‐vacancies became dominant in the Si‐H Raman spectrum. (001) platelets and microcracks apppeared in the c‐Si beyond the a‐Si layer, leading to the exfoliation of a 90‐nm thick layer. Deuterium implantation leads to the formation of a thicker (∼100 nm) amorphous layer but inhibits exfoliation. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.002 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".