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Record W2052722425 · doi:10.1116/1.4821550

Thin film Ni-Si solid-state reactions: Phase formation sequence on amorphized Si

2013· article· en· W2052722425 on OpenAlexafffund
Pierre Turcotte-Tremblay, Matthieu Guihard, Simon Gaudet, M. Chicoine, C. Lavoie, P. Desjardins, F. Schiettekatte

Bibliographic record

VenueJournal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013
Typearticle
Languageen
FieldPhysics and Astronomy
TopicSemiconductor materials and interfaces
Canadian institutionsPolytechnique MontréalUniversité de MontréalRegroupement Québécois sur les Matériaux de Pointe
FundersNatural Sciences and Engineering Research Council of CanadaU.S. Department of Energy
KeywordsRutherford backscattering spectrometryMaterials sciencePole figureTransmission electron microscopyMisorientationSubstrate (aquarium)Phase (matter)Analytical Chemistry (journal)CrystallographyMetastabilityTexture (cosmology)DiffractionThin filmIon implantationIonMicrostructureChemistryOpticsNanotechnologyMetallurgy

Abstract

fetched live from OpenAlex

The phase formation sequence during the thermally induced solid-state reaction of a 10-nm-thick magnetron-sputtered Ni film with a Si(001) substrate amorphized by ion implantation (a-Si) is investigated using a combination of in situ temperature-resolved x-ray diffraction and ex situ x-ray pole figure analyses, transmission electron microscopy, and Rutherford backscattering spectrometry. Our results reveal (1) that the metastable θ-phase grows from δ-Ni2Si and directly transforms into NiSi and (2) that cleaving the as-prepared, amorphized samples are often subject to a spontaneous reaction possibly resulting from cleaving. In the spontaneously reacted samples, a mixture of θ and NiSi is observed from the beginning of the thermal treatment. The θ phase exhibits a (110) fiber texture with a ±10° misorientation, which is then inherited by NiSi. The rest of the phase sequence is the same as for nonreacted samples, the NiSi2 growing from 390 °C if the amorphized Si is not completely consumed.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.043
Threshold uncertainty score0.959

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0010.001
Science and technology studies0.0010.001
Scholarly communication0.0000.001
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.023
GPT teacher head0.273
Teacher spread0.250 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations4
Published2013
Admission routes2
Has abstractyes

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