3D Hybrid Integration Technology for Opto-Electronic Hetero-Integrated Systems
Bibliographic record
Abstract
We developed a 3D hybrid integration technology of complementary metal oxide semiconductor (CMOS), micro electro mechanical systems (MEMS) and photonic circuits for opto-electronic hetero-integrated systems. The 3D opto-electronic multi-chip module comprising CMOS, MEMS, and photonic devices was fabricated by using 3D hybrid integration technology. The electrical chips of amplitude shift keying (ASK) LSI, LC filter and pressure-sensing MEMS were mounted on the electrical Si interposer with Cu through silicon vias (TSVs). The photonic chips of vertical-cavity surface-emitting laser (VCSEL) and photodiode (PD) were embedded into the optical Si interposer with an optical waveguide. The electrical and the optical interposers were precisely bonded together to form 3D opto-electronic multi-chip module. The photonics and electrical devices are communicated via Cu TSVs. The photonic devices were connected via an optical waveguide. Basic functions of CMOS, MEMS and photonic devices in the 3D opto-electronic multi-chip module were successfully evaluated.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".