Effects of the Metallurgical Properties of Upper Cu Film on Stress-Induced Voiding (SIV) in Cu Dual-Damascene Interconnects
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Bibliographic record
Abstract
Stress-induced voiding (SIV) is a serious problem in Cu dual-damascene interconnects (DDIs). The stress gradient under vias is the driving force of vacancy diffusion and void generation, therefore stress control in Cu-DDI is an important factor for suppressing SIV. In this study, the stress effect of upper Cu film on SIV in lower Cu lines is investigated, and the stress distribution in Cu-DDI is analyzed by finite element analysis. It is found that SIV in the lower Cu lines is strongly affected not only by the width of lower lines but also by the metallurgical properties of the Cu film in upper metals. Suppression of tensile stress in the via of the upper Cu film decreases the stress gradient in the lower line around the via, and eventually, the driving force of vacancy diffusion to the via bottom. Control of the metallurgical properties to suppress Cu creep during annealing is a key factor for decreasing SIV in lower Cu lines. High-temperature deposition of Cu film with a small coefficient of thermal expansion (CTE) is a solution to suppressing SIV failure in Cu-DDIs.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it