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Record W2082360686 · doi:10.1002/pssa.200790012

Review Article: Hydrogen blistering of silicon: Progress in fundamental understanding

2007· article· en· W2082360686 on OpenAlexaffabout
B. Terreault

Bibliographic record

Venuephysica status solidi (a) · 2007
Typearticle
Languageen
FieldEngineering
TopicThin-Film Transistor Technologies
Canadian institutionsInstitut National de la Recherche Scientifique
Fundersnot available
KeywordsMicroelectronicsNanotechnologyEngineering physicsSiliconMaterials scienceSilicon on insulatorWaferTelecommunicationsOptoelectronicsEngineering

Abstract

fetched live from OpenAlex

Abstract The understanding of blistering mechanisms at the fundamental, atomic‐scale level is still not complete, but large strides towards that goal have been made in the last decade. In this issue's Review Article [1] Bernard Terreault gives a comprehensive survey of this progress, discussing the current questions as well as outlining suggestions for future work. The related cover picture shows atomic force micrographs of a variety of surface morphologies obtained by hydrogen ion implantation into silicon followed by rapid thermal annealing. In this particular case, the ions were implanted through PMMA masks of decreasing width (from left to right, 6 μm, 1 μm, 600 nm and 150 nm) [2]. This is but one application of blistering, the most common being ion‐cutting and layer transfer as used in the commercial production of silicon‐on‐insulator wafers. The author is Honorary retired Professor at the EMT (Energy, Materials, Telecom) Center of the Institut National de la Recherche Scientifique (Université du Québec). Another feature included in the current issue is the Editor's Choice contribution ‘Optical and micro‐analytical study of a copper–conjugated polymer composite’ by Kaushik Mallik et al. [3], where the authors investigate a nanoscale fiber network for potential application in microelectronic systems.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Not applicable · Consensus signal: Not applicable
GenreCandidate signal: Review · Consensus signal: Review
Teacher disagreement score0.006
Threshold uncertainty score0.020

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0010.001
Meta-epidemiology (narrow)0.0010.000
Meta-epidemiology (broad)0.0020.000
Bibliometrics0.0010.002
Science and technology studies0.0000.001
Scholarly communication0.0010.002
Open science0.0020.001
Research integrity0.0020.002
Insufficient payload (model declined to judge)0.0060.004

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.033
GPT teacher head0.276
Teacher spread0.243 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designNot applicable
Domainnot available
GenreReview

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations0
Published2007
Admission routes2
Has abstractyes

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