Silicon nanocrystal formation in silicon-rich silicon oxide thin films
Bibliographic record
Abstract
Silicon rich silicon oxide thin films have been fabricated by electron cyclotron resonance plasma enhanced chemical vapor deposition. Following their deposition, these films were subjected to thermal anneals at temperatures up to 1100°C for times of up to 120 minutes. Annealing of the films causes a phase separation of the material to form Si precipitates, which nucleate to form Si nanocrystals, within an amorphous SiO<sub>2</sub> matrix. The nucleation of the nanocrystals was analyzed as a function of the composition of the films, as determined by Rutherford backscattering and elastic recoil detection analysis experiments, and the annealing conditions. The bonding structure of the films was analyzed using Fourier transform infrared spectroscopy. Surface morphology, including analysis of the size and distribution of the nanocrystals, was determined through the use of atomic force microscopy. Spectroscopic ellipsometry, in the range from 600 to 1100 nm, was used to examine the effects of the formation of nanocrystals on the optical properties, i.e., index of refraction and extinction coefficient, of the films. Photoluminescence spectra were used to show that due to quantum confinement effects the nanocrystals exhibit luminescence, making them a potential candidate for integrated photonic emitters.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".