Investigation of AlMe<sub>3</sub>, BEt<sub>3</sub>, and ZnEt<sub>2</sub>as Co-Reagents for Low-Temperature Copper Metal ALD/Pulsed-CVD
Bibliographic record
Abstract
The reactions of AlMe 3, BEt 3, and ZnEt 2 with toluene solutions of the copper(II) complexes [CuL 2 ] {L = acetylacetonate (acac; 1 ), hexafluoroacetylacetonate (hfac; 2 ), N -isopropyl-β-ketiminate (acnac; 3 ), N, N -dimethyl-β-diketiminate (nacnac; 4 ), 2-pyrrolylaldehyde (PyrAld; 5 ), N -isopropyl-2-pyrrolylaldiminate (PyrIm i Pr; 6a ), N -ethyl-2-pyrrolylaldiminate (PyrIm Et; 6b ), and N -isopropyl-2-salicylaldiminate (IPSA; 7 )} were investigated, and most combinations were found to deposit metal films or metal powder at 50 °C or less. SEM and XPS of metal films deposited on ruthenium showed a range of morphologies and compositions, including pure copper (excluding oxygen content after atmospheric exposure). These nonaqueous solution screening studies provided a rapid and convenient means to identify the most promising [Cu II L 2 ] precursor/ER n co-reagent combinations for copper metal ALD/pulsed-CVD studies, and subsequent ALD/pulsed-CVD studies were performed using 6b in combination with AlMe 3, BEt 3 and ZnEt 2 . As in solution, the reactivity of these reagents (pulsed-CVD) followed the order ZnEt 2 ≈ AlMe 3 ≫ BEt 3 . Furthermore, at 120−150 °C, ZnEt 2 was used successfully to deposit smooth, conductive films composed of copper with 8−15% Zn. On the basis of CVD studies with ZnEt 2, zinc content appears to derive from a parasitic CVD process, which becomes more favorable above 120 °C, detracting from the goal of self-limiting deposition.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".