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Record W2090485145 · doi:10.1116/1.1491549

Comparison of two different Ti/Al/Ti/Au ohmic metallization schemes for AlGaN/GaN

2002· article· en· W2090485145 on OpenAlex
J. A. Bardwell, G. I. Sproule, Y. Liu, H. Tang, J. B. Webb, J. Fraser, Pamela A. Marshall

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueJournal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002
Typearticle
Languageen
FieldPhysics and Astronomy
TopicGaN-based semiconductor devices and materials
Canadian institutionsInstitute for Microstructural Sciences
Fundersnot available
KeywordsOhmic contactMaterials scienceOptoelectronicsContact resistanceAugerWaferAuger electron spectroscopyHeterojunctionPassivationAnnealing (glass)Transmission electron microscopyLayer (electronics)MetallurgyComposite materialNanotechnology

Abstract

fetched live from OpenAlex

Two different ohmic metallization schemes for AlGaN/GaN heterostructure field-effect transistor structures are investigated. Each consists of Ti/Al/Ti/Au layers, with the Ti contacting the AlGaN surface, and they differ only in the relative thicknesses of Ti and Al. The “Cornell” metallization consists of 20/100/45/55 nm thicknesses, respectively, while the “NRC” metallization consists of 30/80/120/55 nm thicknesses for the layers. Thus, the Cornell scheme is much richer in Al. The two schemes were compared on the same AlGaN/GaN growth wafer which, because of nonuniformity, provides a variety of contact resistances in the final annealed devices. The Cornell scheme formed good quality ohmic contacts at short anneal times, but clearly contained excess, unalloyed Al, as it showed visible, gas-evolving corrosion in a cleaning solution consisting of 1:1 HCl:H2O. The surface morphology was rough and the edge acuity was relatively poor. Auger depth profiling showed a single, almost uniformly mixed layer. The NRC scheme required a longer anneal time, and the contact resistance remained high for larger grained AlGaN/GaN material. It was stable in the HCl:H2O cleaning solution, and exhibited good edge acuity and a smooth surface morphology. Auger electron depth profiling of the NRC scheme showed two layers present in the annealed metal. The Auger results are consistent with transmission electron microscope results presented elsewhere. The results suggest that the Cornell scheme would be the choice for materials that are more difficult to contact.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.046
Threshold uncertainty score0.741

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.035
GPT teacher head0.297
Teacher spread0.262 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it