Fabrication of high performance GaN modulation doped field effect transistors
Why this work is in the frame
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Bibliographic record
Abstract
Fabrication of GaN devices presents a number of processing issues. Since the AlGaN/GaN material and sapphire substrates are transparent in the ultraviolet, light scattering can degrade the quality of the lithography. GaN and AlGaN are chemically inert materials, highly resistant to wet etching. Schottky contacts are fabricated with noble metals (Pt, Au) which present adhesion problems. The approaches to solving these difficulties and the routes to fabrication of high performance GaN-based modulation doped field effect transistors are presented. The light scattering has been addressed by the deposition of amorphous Si on the backside of the wafers. Mesa etching for device isolation has been performed with both chemically assisted ion beam etching and a newly developed wet etching technique. Finally, metal adhesion has been greatly improved by the initial deposition of a thin sputtered Pt layer, followed by a thick layer of Pt/Au by e-beam evaporation. A 100 μm wide device showed a maximum dc current density of 946 mA/mm, a peak transconductance of 160 mS/mm, a short circuit current gain cutoff frequency of 15.6 GHz, and a maximum oscillation frequency of 49.4 GHz.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it