Bulk micromachining for SOI based microsystems using double side XeF<SUB align=right>2 etching
Bibliographic record
Abstract
Microfabrication is pivotal in any microsystem synthesis. Even through silicon is the most common material used in the Micro Electro Mechanical System (MEMS) foundry, Silicon on Insulator (SOI) wafers are very promising for the fabrication of Micro Opto Electro Mechanical System (MOEMS) Devices such as micromirrors due to their better optical reflectivity, low residual stress and compatibility with silicon microfabrication processes. The present work explores the possibility of patterning and using controlled pulse etching method involving Xenon difluoride (XeF2) to etch SOI wafers to realise micromirrors. Pulse-etching method is proposed due to its better control and etching uniformity. This paper also presents the process flow for the fabrication of SOI based micromirrors through double side XeF2 micromachining which involves mask preparation, photolithography and pulse etching. The presented results also include etch characteristics obtained on SOI wafers.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".