Design, Fabrication, and Characteristics of a MEMS Micromirror With Sidewall Electrodes
Bibliographic record
Abstract
This paper presents a 2-DOF silicon-on-insulator (SOI) microelectromechanical systems (MEMS) mirror with sidewall (SW) electrodes. The biaxial MEMS mirror with SW is actuated by electrostatic actuators. The dimension of mirror plate is 1000¿m × 1000¿m, with a thickness of 35 ¿m. The analytical modeling, fabrication process, and performance characteristics are described. This paper analyzes the effects of the three-end single crystal serpentine torsion bar width and the bottom and SW electrodes on the performance of the mirror. A new fabrication process based on SOI wafer, hybrid bulk/surface micromachined technology, and a high-aspect-ratio shadow mask is presented. In comparison to previous fabrication processes and the Optical iMEMS process, the process is novel, easily understood, and simple to realize. The measured maximum angular deflection achieved is ±11°(mechanical angle) at a static operating voltage and is ± 21°(mechanical angle) at resonance frequency driving. This mirror is well suited for applications where these characteristics are critical, such as in confocal or endoscopic scanning elements
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".