MEMS 3D optical mirror/scanner
Bibliographic record
Abstract
This paper presents a novel MEMS optical mirror based on a proprietary fabrication process. The mirror is fabricated with single crystal silicon and has hexagonal reflective surface 600 /spl mu/m across, with a measured surface roughness is less than 20 angstroms RMS and a radius of curvature of greater than 5 meters. The device has a full 360/spl deg/ of Z rotation at up to 3/spl deg/ (/spl sim/1/spl deg/ controllable) of out of X-Y plane tilt angle depending the design parameters. This mirror has no perforation holes on the reflective surface and no stiction problems during fabrication or operation. The addition of lateral comb drive actuators gives the mirror up to 4 /spl mu/m X and Y in-plane movement. The control of X and Y translation is totally independent and free of movement interference. Due to all electrostatic actuation, the device has lower power consumption, with a designed driving voltage of less than 120 volts. Simulation results, including modal analysis, are included.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".