A novel micro-fabrication process for integration of Superconductor niobium-based RF circuits with gold-based RF MEMS devices
Bibliographic record
Abstract
A novel 8-mask fabrication process for the integration of Low Temperature Superconducting (LTS) niobium (Nb) RF circuits with gold-based RF MEMS switches is proposed. A fixed and a tunable 3-pole bandpass filter (BPF) are fabricated implementing the new Nb-based fabrication process. The tunable BPF includes nine dc-contact RF MEMS switches. The center frequency of the tunable BPF shifts from 10 GHz to 9 GHz when the three switches that change the length of the resonators are in the `on' state and the other six are in the `off' state. The first version of the tunable BPF is all gold-based, which is measured at room temperature. The insertion loss of the all gold-based tunable BPF is close to 5.5 dB. The switches actuation voltage is around 32 V at room temperature. The fixed version of the BPF is fabricated using Nb as the lossless metal layer. Measurement of the fixed Nb-based BPF shows 4.4 dB improvement in the insertion loss at 4 K. The tunable version of the superconducting BPF is also fabricated and measured at 4 K. There is 1 GHz shift in the center frequency of the filter when the three RF MEMS switches are actuated. The actuation voltage of the gold-based RF MEMS switches at 4 K is about 48 V.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".