A new generation industrial machine for the plasma immersion ionimplantation and enhanced deposition
Bibliographic record
Abstract
A new generation industrial machine for the plasma immersion ion implantation and enhanced deposition has been recently developed by Southwestern Institute of Physics. The vacuum chamber, 900 mm in diameter and 1050 mm in height, is constructed of stainless steel and stands vertically on a base support. Two 1400 L/m turbomolecular pumps and a 30 L/min mechanical pump can be controlled by PLC and bring the chamber to a base pressure of 4×10 4 Pa. Gaseous and metallic plasma can be independently produced by hot filaments discharge and three high efficiency filter vacuum arc plasma sources. There are water cooling target chuck and back flanges on the top of the vacuum chamber. The power modulator operates in both the pulse bunching and single pulse modes. The pulse voltage output is 10～80 kV, repetition frequency is 50～500 Hz,and the rise time of the pulse is less than 2 μs. In general, plasma density is 10 8～10 10 cm 3 , and film deposition rate is 0.1～0.5 nm/s. Some experimental results are also reported in the paper.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.001 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.004 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".