A new generation industrial machine for the plasma immersion ionimplantation and enhanced deposition
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
A new generation industrial machine for the plasma immersion ion implantation and enhanced deposition has been recently developed by Southwestern Institute of Physics. The vacuum chamber, 900 mm in diameter and 1050 mm in height, is constructed of stainless steel and stands vertically on a base support. Two 1400 L/m turbomolecular pumps and a 30 L/min mechanical pump can be controlled by PLC and bring the chamber to a base pressure of 4×10 4 Pa. Gaseous and metallic plasma can be independently produced by hot filaments discharge and three high efficiency filter vacuum arc plasma sources. There are water cooling target chuck and back flanges on the top of the vacuum chamber. The power modulator operates in both the pulse bunching and single pulse modes. The pulse voltage output is 10～80 kV, repetition frequency is 50～500 Hz,and the rise time of the pulse is less than 2 μs. In general, plasma density is 10 8～10 10 cm 3 , and film deposition rate is 0.1～0.5 nm/s. Some experimental results are also reported in the paper.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it