Characterization of high‐aspect‐ratio periodic structures by X‐ray photoelectron spectroscopy
Bibliographic record
Abstract
X‐ray photoelectron spectroscopy (XPS) is a powerful surface characterization technique often relied on for quantification of surface species and coverages. Investigation of silicon microrods, considered a model for high‐aspect‐ratio structures, at different angles with respect to substrate normal was determined to have a significant impact on the relative sensitivity of surface‐bound species on rods relative to the base substrate. Comparison between planar silicon and microrod arrays demonstrates that the angular dependence is complicated and that careful studies must optimize conditions to differentiate between surfaces. In addition, the use of reverse angle resolved XPS, where the substrate is turned away from the X‐ray source, is shown to assist in simplifying the spectrum by removing underlying signal from the substrate near the base. Copyright © 2016 John Wiley & Sons, Ltd.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.003 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".