MétaCan
Menu
Back to cohort
Record W2895927807 · doi:10.1088/1361-6641/aae810

Contactless non-destructive imaging of doping density and electrical resistivity of semiconductor Si wafers using lock-in carrierography

2018· article· en· W2895927807 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueSemiconductor Science and Technology · 2018
Typearticle
Languageen
FieldEngineering
TopicIntegrated Circuits and Semiconductor Failure Analysis
Canadian institutionsUniversity of Toronto
FundersNatural Sciences and Engineering Research Council of CanadaNational Natural Science Foundation of ChinaCanada Research Chairs
KeywordsWaferElectrical resistivity and conductivityDopantMaterials scienceDopingSemiconductorOptoelectronicsSiliconOpticsElectrical engineeringPhysics

Abstract

fetched live from OpenAlex

Abstract A contactless non-destructive imaging method for spatially resolved dopant concentration, [2.2] N d , and electrical resistivity, ρ , of n - and p -type silicon wafers using lock-in carrierography images at various laser irradiation intensities is presented. Amplitude and phase information from wafer sites with known resistivity was employed to derive a calibration factor for accurate determination of the absolute carrier generation rate. A frequency-domain model based on the nonlinear nature of photocarrier radiometric signals was used to extract dopant density images. Lateral variations in the resistivity of an n -type and a p -type wafer obtained by means of this methodology were found to be in excellent agreement with those obtained with conventional 4-point probe measurements. This all-optical contactless method can be used as a non-destructive tool for doping density and electrical resistivity measurements and their images over large semiconductor areas. N d , ρ and their variances can be measured and mapped for the photovoltaic, micro- and opto-electronic industries including on wafers with oxides or surface treated layers for which contacting electrical measurements are impossible.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesScience and technology studies
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.085
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0020.003
Science and technology studies0.0000.003
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.007
GPT teacher head0.227
Teacher spread0.220 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it