Dimpled electrostatic MEMS actuators
Bibliographic record
Abstract
We present electrostatic Micro-Electromechanical System actuators equipped with dimples and contact pads. The introduction of dimples and contact pads is shown to prevent stiction between the actuator and bottom electrodes and minimize dielectric charging and to eliminate multi-valuedness in the response. It also increases the stable travel range by eliminating the pull-in instability and introducing new “tapping mode” oscillations, where the dimples come into regular contact with the contact pads. An experimentally validated lumped-mass model was developed and used to generate the bifurcation diagram of the actuator in the vicinity of tapping mode oscillations. The diagram showed the presence of a chaotic attractor bracketed by a type-I intermittency and a cascade of period-doubling bifurcations. However, these chaotic motions were only present for a limited range of the excitation amplitude and frequency. Provided these ranges are excluded, dimples and contact pads can be deployed to obtain efficient and well regulated electrostatic actuators. We found that these results and conclusions are valid for classes of low-frequency as well as high-frequency actuators.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".