Flexible and low-cost fabrication of optical waveguides by UV laser resist-mask writing
Bibliographic record
Abstract
We report on UV laser photoresist mask writing as a tool for fabricating integrated optical waveguides and devices. Using 375 nm laser light and a pneumatically controlled direct writing stage, we defined mask features into a 250-nm-thick negative photoresist layer on a silicon nitride film on an oxidized silicon substrate. We investigated the feature size and edge roughness for different laser powers. Using the photoresist mask layer and reactive ion etching, we patterned high-refractive-index-contrast silicon nitride strip waveguides and devices with varying waveguide widths and gaps. We report on the structural and transmission characteristics of a directional coupler, Sagnac interferometer, and ring resonator and demonstrate 50/50 coupling at 1510 nm, 20 dB transmission drop at 1580 nm, and a Q factor of ∼13,000 at 1576 nm, respectively. These results demonstrate that this technique can be applied to a variety of thin film materials and substrates for inexpensive and rapid prototyping of integrated photonic devices.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".