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Record W3087764137 · doi:10.1149/09807.0117ecst

Influence of Glass Surface Modification on Thin Film Copper Electrodes

2020· article· en· W3087764137 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueECS Transactions · 2020
Typearticle
Languageen
FieldMaterials Science
TopicCopper Interconnects and Reliability
Canadian institutionsResearch & Development Corporation
Fundersnot available
KeywordsMaterials scienceCopperComposite materialMicrostructureTransmission electron microscopySheet resistanceSurface modificationElectrodeHydrofluoric acidScanning electron microscopeMicrofabricationLayer (electronics)MetallurgyNanotechnologyChemical engineeringChemistry

Abstract

fetched live from OpenAlex

We investigate the impact of the glass surface on the structural and electrical properties of Ti/Cu film stacks as well as single Ti adhesion layer, by modifying Corning® Eagle XG® glass surfaces using four acids common in TFT-LCD microfabrication processes. Atomic force microscopy results indicate significant change of the surface topography of Ti and Cu, particularly found on hydrofluoric acid treated glass surfaces. The film microstructures are characterized by a comprehensive analysis using Bragg, grazing incidence and in-plane X-ray diffraction, and X-ray reflectivity methods as well as the transmission electron microscopy. The sheet resistance was measured using the four-point probe method. We demonstrate the role of the glass surface state through its impact on the structural and electrical properties of Ti/Cu electrodes emanating from glass surface treatments.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.382
Threshold uncertainty score0.427

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.022
GPT teacher head0.259
Teacher spread0.237 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it