A Packaged THz Shunt RF MEMS Switch With Low Insertion Loss
Bibliographic record
Abstract
This paper demonstrates a packaged THz shunt capacitor micro-electromechanical systems (MEMS) switch with low insertion loss. In-line shunt switch is used to achieve a low loss in THz band, which is realized by reducing the equivalent parallel inductance of switch. The equivalent circuit of the switch is analyzed systematically, the equivalent resistance is obtained based on the skin effect of high frequency current on the conductor and the current density distribution characteristics of the conductor cross-section. The equivalent capacitance is obtained by using “double microstrip” characteristic impedance calculation method, and the correction factor (<inline-formula> <tex-math notation="LaTeX">$\Delta$ </tex-math></inline-formula>) is introduced to calculate the equivalent inductance accurately. By optimizing equivalent circuit parameters and switch sizes, the structure of MEMS switch with low loss and high isolation characteristics are achieved. The switch is packaged by rectangular waveguide and achieved a low insertion loss. The comparison between the switch simulation results and the equivalent circuit simulation results verify that the parameter extraction method and circuit analysis are correct. The packaged MEMS switch is measured, and the results are in an acceptable agreement with simulation, the switch is actuated under voltage of ~30V. The measured result has achieved a low insertion loss with less than < 2dB from 220 to 280GHz, and isolation with ~16 dB from 240GHz to 320GHz in the “down” state.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".