Accessible, large-area, uniform dose photolithography using a moving light source
Bibliographic record
Abstract
Abstract Photolithography is an essential microfabrication process in which ultraviolet (UV) light is projected through a mask to selectively expose and pattern a light-sensitive photoresist. Conventional photolithography devices are based on a stationary UV lamp and require carefully-designed optics to ensure that a uniform exposure dose is provided across the substrate being patterned. Access to such systems is typically limited to certain labs with domain-specific expertise and sufficient resources. The emergence of light emitting diode (LED)-based UV technologies has provided improved access to the necessary light sources, but issues with uniformity and limited exposure sizes still remain. In this work, we explore the use of a moving light source (MOLIS) for large-area lithography applications, in which the light source path speed, elevation, and movement pattern can be used to smooth out any spatial variations in source light intensity profiles, and deliver a defined and uniform cumulative UV exposure dose to a photoresist-coated substrate. By repurposing a 3D printer and UV-LED flashlight, we constructed an inexpensive MOLIS platform, simulated and verified the parameters needed to produce a uniform UV dose exposure, and demonstrate this approach for SU-8 microfabrication of features with dimensions relevant to many areas in biomedical engineering. The ready accessibility and inexpensive nature of this approach may be of considerable value to small laboratories interested in occasional and low-throughput prototype microfabrication applications.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".