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Record W4404186048 · doi:10.1116/6.0003933

Epitaxial SiGeSn grown on Si by ion implantation

2024· article· en· W4404186048 on OpenAlex
Chinenye Uchenna Ekeruche, Mikayla Davila, P.J. Simpson, K. L. Kavanagh, Lyudmila V. Goncharova

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueJournal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2024
Typearticle
Languageen
FieldEngineering
TopicIntegrated Circuits and Semiconductor Failure Analysis
Canadian institutionsSimon Fraser UniversityOkanagan University CollegeUniversity of British Columbia, Okanagan CampusUniversity of British ColumbiaWestern University
FundersNatural Sciences and Engineering Research Council of CanadaTertiary Education Trust FundWestern University
KeywordsMaterials scienceEpitaxyIon implantationOptoelectronicsIonNanotechnologyChemistryLayer (electronics)

Abstract

fetched live from OpenAlex

We have formed SixGe1−x−ySny compounds on Si substrates by ion implantation and annealing and investigated their concentration profiles, crystallization, and optical properties. Ge and Sn ions were implanted in the range (2.5–10) × 1016 Ge/cm2 at 65 keV, and (1.0–4.0) × 1016 Sn/cm2 at 100 keV, resulting in a peak implant dose at a depth of 50 nm for both species. Epitaxially regrown SixGe1−x−ySny layers (110 nm thick) were produced with Ge and Sn contents that allowed bandgap tuning in the (0.88–1.1) eV range. Shifts in photoelectron binding energies (Si 2p, Ge 3d, and Sn 3d) were consistent with ternary compound formation. Sn segregation was observed for annealing temperatures ≥600 °C. A significant increase in the optical absorption coefficient (×104 cm−1 for λ = (800–1700) nm) was observed for SiGe, SiSn, and SiGeSn alloys, with SiGeSn having coefficients several orders of magnitude higher than for Si. Contributions of segregated Sn to these properties were observed. Metastable SixGe1−x−ySny layers were achieved, which may point to a promising route to mitigate Sn incorporation challenges for near-infrared detectors.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.061
Threshold uncertainty score0.781

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0020.001
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.007
GPT teacher head0.207
Teacher spread0.200 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it