Rapid nucleation of ZnO on MoS<sub>2</sub> and WS<sub>2</sub> using an atmospheric-pressure spatial atomic layer deposition system
Bibliographic record
Abstract
Abstract Uniform deposition of metal oxides on 2D materials, while preserving their structural integrity, is a crucial step to realize the integration of 2D materials in practical devices. In this study, we demonstrate the rapid nucleation of ZnO using atmospheric-pressure spatial chemical vapor deposition (AP-SCVD) on 2D transition metal dichalcogenides MoS 2 and WS 2 . The high precursor partial pressure and uniform precursor delivery afforded by the AP-SCVD process, as compared to conventional atomic layer deposition (ALD), led to rapid ZnO nucleation on both CVD-grown MoS 2 and WS 2 in as little as 5 AP-SCVD oscillations and complete film closure was achieved on CVD-grown WS 2 flakes in less than 60 AP-SCVD oscillations. The ZnO nuclei formed larger interconnected clusters on MoS 2 , whereas more-isolated islands were formed on the WS 2 . Raman and photoluminescence (PL) spectroscopy revealed that AP-SCVD is a benign process that does not damage the underlying 2D materials and rather helps to passivate defects via oxygen/water adsorption from the air, when performed in an appropriate temperature window. Deposition of the ZnO was found to impact the optical and structural properties of CVD-grown MoS 2 and WS 2 differently. For the MoS 2 –ZnO heterostructure, electron doping and strain dominate, resulting in a reduction in the PL of MoS 2 , whereas for the WS 2 –ZnO, strain and dielectric screening have a larger impact, resulting in an enhanced PL.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".