Interpolating Control for Precision Positioning affected by pre-sliding Friction
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
For wafer inspection, an X-Y stage is used to position the wafer under a probe, such as X-ray or similar, with an accuracy of tens of nano-meters or less. The point-to-point movement typically consists of three phases: “move” when the position is controlled to follow a so-called S-curve, “settle” when the position is made to enter the convergence window, and “idle” when residual vibrations are damped and the position reaches the set-point with required accuracy. The “move” and “settle” plants are characterized by double-integrator dynamics with viscous and Coulomb friction, and the “idle” plant by pre-sliding friction dynamics that can be modeled as one or more mass-spring-damper systems. Taking into account high-frequency parasitic resonances and anti-resonances, non-linearities, and uncertainties, it is in general difficult, or impossible, to design one linear regulator for all three phases. Hence, one regulator is generally applied for “move” and “settle”, and another one for the ”idle” phase. The problem of switching between the regulators, preferably in a bump-less way in order not to evoke the parasitic resonances, has been treated in an ad-hoc manner in the literature and in industrial practice. Here, we suggest bump-less transfer between the regulators based on interpolating control, using a recent, simple friction model that includes pre-sliding.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it