Development of thin Film Piezoelectric Aluminum Nitride on Stainless Steel Substrates
Bibliographic record
Abstract
Textured thin film sputter deposited Aluminum Nitride (AlN) is widely used as a piezoelectric material for energy harvesting applications. However, it is typically deposited onto single crystal silicon substrates. This paper reports for the first time the deposition of piezoelectric AlN onto stainless steel (SS) substrates which can be advantageous for energy harvesters due to its mechanical properties. The study investigated using three types of SS (17-4, 420, and 304) and compared the results to AlN on Si. Piezoelectric properties (d<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">33,f</inf>) of 3.79 pC/N and 5.21 pC/N were measured for AlN on 304 SS and Si substrates respectively. The piezoelectric properties and crystallinity were highly dependent on the surface roughness of the SS. Output voltage power from a tapping test demonstrated a peak-to-peak voltage of 3.62 V and 4.6 V for AlN/SS and AlN/Si films.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".